Predicting actual from virtual

Advanced Software Platforms for MEMS

Coventor is a market leader in automated solutions for developing semiconductor process technology, as well as micro-electromechanical systems (MEMS). For over two decades, Coventor has supplied world-leading MEMS companies and R&D organizations with simulation tools that accurately predict the complex, multi-physics behavior of MEMS devices.

CoventorMP

CoventorMP combines the complementary strengths of Coventor’s industry-leading software tools for MEMS design, CoventorWare and MEMS+, into a single powerful environment for MEMS design automation.

MEMS+ and CoventorWare work seamlessly together in the CoventorMP framework. They provide a design platform that enables MEMS designers to simulate critical end-product performance specs such as sensitivity, linearity, frequency response, signal-to-noise ratio, temperature stability or actuation time. Both products are useful in all phases of a typical MEMS development program. These software tools are ideal for MEMS devices that employ mechanical, electrostatic, piezo-electric, piezo-resistive, or thermal effects for sensing or actuation.

 
 

MEMS+

MEMS+ provides an integrated environment for engineers who design MEMS devices and integrate MEMS with systems and circuits. It is ideal for designing and optimizing MEMS devices that depend on electrostatics for sensing and actuation.

CoventorWare

CoventorWare is a suite of field solvers integrated with pre- and post-processing tools. The suite has many MEMS-specific features that make it the preferred choice over general-purpose finite element tools for simulating MEMS and other micro-fabricated devices.

MEMS+

MEMS+ is a software platform for engineers who design MEMS devices and integrate MEMS devices with CMOS circuits and packaging. It is ideal for designing and optimizing MEMS-based components such as motion sensors (accelerometers and gyroscopes), microphones, micro-mirrors, micro-switches, timing devices and energy harvesters.

MEMS+ users assemble advanced finite elements (building blocks) into a completed design, which can be simulated up to 100 times faster than using conventional finite element analysis tools. The dramatic improvement in simulation time makes it feasible to analyze complex multiphysics behavior and improve the performance and reliability of product designs. MEMS+ designs can be directly included in MathWorks® system models and Cadence® circuit designs.

Design entry in MEMS+ starts with a parametric definition of the fabrication technology, including the process stack and material properties. MEMS+ includes an intuitive, 3D user interface that makes design entry easy and fast.

MEMS+ includes a library of parametric MEMS components, or building blocks, such as rigid shapes, flexible mechanical shapes, electrodes, and electrostatic combs.  Designers assemble selected components into fully-parametric MEMS device models that support rapid exploration of the design space.

Integration with the MathWorks environment makes it easy to automate simulations using MATLAB® scripts and include MEMS+ blocks in Simulink® system models. Designers can perform DC, AC and transient simulations of the multi-physics MEMS device alone or connected with drive and read-out signals. Additional capabilities include electrostatic pull-in and lift-off analysis, and non-linear frequency response.

Integration with Cadence Virtuoso® makes it easy to import accurate MEMS+ models and connect them with drive and read-out circuits. Designers can run DC, AC, transient and noise analyses to evaluate nominal behavior and corner cases. Also, MEMS+ designs can be exported as Cadence parametric layout cells (PCells) for use in full-die layout and physical verification.

MEMS+ Results Visualization forms an important bridge in communicating simulation results to the MEMS specialist. By turning simulation data into 3D animations, Results Visualization provides a designer with detailed feedback on MEMS device response when the device is subjected to electrical or mechanical stimulus.

CoventorWare

CoventorWare is an integrated suite of design and simulation software that has the accuracy, capacity and speed to address real-world MEMS designs. The suite has many MEMS-specific features for modeling and simulating a wide range of MEMS devices, including inertial sensors (accelerometers and gyroscopes), microphones, resonators and actuators. The software’s field solvers can model a wide range of MEMS-specific multi-physics, such as electrostatics, coupled electro-mechanics, piezoelectric, piezoresistive and damping effects.

CoventorWare is widely recognized within the MEMS industry as the best-in-class solution for multi-physics MEMS simulation, and sets the standard for MEMS simulation accuracy, capacity and speed.

To efficiently mesh the high-aspect-ratio structures typical of MEMS, it is imperative to use hexagonal (hex) elements rather than tetrahedral elements. CoventorWare includes a selection of meshing algorithms for generating hex-dominant meshes that are optimal for MEMS structures.

CoventorWare is widely recognized for accurately simulating electrostatic capacitance and force, along with non-linear, coupled electro-mechanics effects such as pull-in, lift-off and electrostatic spring softening. CoventorWare uses a hybrid finite-element/boundary-element (FEM/BEM) approach that avoids compromises to accuracy and efficiency.

Whether simulating the transient response of an accelerometer, or estimating the Q factor of a resonator, modeling damping correctly is crucial. With CoventorWare, it is possible to simulate energy loss mechanisms and accurately predict damping coefficients.

CoventorWare provides a unique approach for simulating piezo-resistive (PZR) sensors, taking advantage of the dominance of the piezoresistive effect over shape change on sensor output. The stress field is pre computed using CoventorWare’s mechanical solver and mapped onto the geometry of the piezo sensor.   

CoventorWare is an ideal environment for designing microbolometers, for which simulating the complete operation of the sensor requires analyzing multiple coupled physical domains, including thermal, mechanical, and electrical domains. It provides a fully coupled thermal-electrical procedure for analyzing this type of problem and employs finite elements that are well suited to modelling the thin films common to this type of device.

During MEMS fabrication, thermal cycling during deposition and etching can generate stress in deposited layers. CoventorWare enables MEMS designers to predict the 3D impact of residual stress by modeling isotropic, anisotropic and stress gradients in complex geometry, including conformal depositions.

CoventorWare couples piezoelectric and mechanical physics to accurately predict the frequency response of devices such as acoustic resonators, or devices that employ piezo physics for sensing and actuation such as energy harvesters.

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